Crystalline semiconductor film, plate-like body and semiconductor device

ABSTRACT

A semiconductor film, a sheet like object, and a semiconductor device are provided that have inhibited semiconductor properties, particularly leakage current, and excellent withstand voltage and heat dissipation. A crystalline semiconductor film or a sheet like object includes a corundum structured oxide semiconductor as a major component, wherein the film has a film thickness of 1 μm or more. Particularly, the semiconductor film or the object includes a semiconductor component of oxide of one or more selected from gallium, indium, and aluminum as a major component. A semiconductor device has a semiconductor structure including the semiconductor film or the object.

CROSS-REFERENCE(S) TO RELATED APPLICATION(S)

The present application is a Continuation of U.S. Non-Provisional patentapplication Ser. No. 16/534,318 filed Aug. 7, 2019, which isContinuation of U.S. Non-Provisional patent application Ser. No.15/320,253 filed Dec. 19, 2016, now U.S. Pat. No. 10,439,028, which isU.S. National Phase Entry of PCT/JP2015/070752 filed Jul. 21, 2015,which claims priority to Japanese Patent Application No. 2014-149313filed Jul. 22, 2014 and Japanese Patent Application No. 2015-125189,filed Jun. 22, 2015, the entire contents of which are incorporated byreference herein.

TECHNICAL FIELD

The present invention relates to a crystalline semiconductor film and asheet like object that are useful for a semiconductor device and asemiconductor device using the crystalline semiconductor film or thesheet like object.

BACKGROUND ART

As a switching device of the next generation achieving high withstandvoltage, low losses, and high temperature resistance, semiconductordevices using gallium oxide (Ga₂O₃) with a large band gap attractattention and are expected to be applied to power semiconductor devices,such as an inverter. According to NPL 1, such gallium oxide has a bandgap that may be controlled by forming mixed crystal with indium oraluminum singly or in combination. Among all, InAlGaO-basedsemiconductors represented by In_(x),Al_(y),Ga_(z),O₃ (0≤X′≤2, 0≤Y′≤2,0X′+Y′+Z′=1.5 to 2.5) are extremely attractive materials.

PTL 1 describes a highly crystalline conductive α-Ga₂O₃ thin film withan added dopant (tetravalent tin). The thin film in PTL 1 is, however,not capable of maintaining sufficient withstand voltage. This film alsocontains many carbon impurities and has unsatisfactory semiconductorproperties including conductivity, so that the film is difficult to beused for a semiconductor device.

PTL 2 describes a Ga₂O₃-based semiconductor element with a p typeα-(Al_(x″)Ga_(1-x″))₂O₃ single crystal film formed on an α-Al₂O₃substrate. The semiconductor element in PTL 2, however, has manyconstraints to be applied to a semiconductor element due to α-Al₂O₃being an insulator and the crystal quality with some problems. The MBEtechnique requires ion implantation and heat treatment at hightemperatures to obtain a p type semiconductor. The p type α-Al₂O₃ itselfis accordingly difficult to be achieved, and in reality, thesemiconductor element in PTL 2 itself is difficult to be achieved.

NPL 2 also describes that an α-Ga₂O₃ thin film can be formed on sapphireby the MBE technique. The description, however, mentions that thecrystal grows up to a film thickness of 100 nm at a temperature of 450°C. or less while the quality of the crystal becomes poor with a filmthickness more than that and a film with a film thickness of 1 μm ormore cannot be obtained.

There is therefore an expectation of an α-Ga₂O₃ thin film with a filmthickness of 1 μm or more and having undegraded crystal quality.

PTL 3 describes a method of manufacturing a crystalline oxide thin filmby mist CVD using bromide or iodide of gallium or indium.

PTLs 4 to 6 describe a multilayer structure having a semiconductor layerwith a corundum crystal structure and an insulating film with a corundumcrystal structure, both laminated on a base substrate with a corundumcrystal structure.

PTLs 3 to 6 are publications on patents or patent applications by thepresent applicant, and at the time of each application, a crystallinethin film having a film thickness of 1 μm or more was not yet able to beobtained. In addition, all films obtained in the methods of PTLs 3 to 6were not able to be peeled off from the substrate in reality.

CITATION LIST

Patent Literature

PTL 1: JP 2013-28480A

PTL 2: JP 2013-58637A

PTL 3: Japanese Patent No. 5397794

PTL 4: Japanese Patent No. 5343224

PTL 5: Japanese Patent No. 5397795

PTL 6: JP 2014-72533A

Non Patent Literature

NPL 1: Kaneko, Kentaro, “Fabrication and physical properties of corundumstructured alloys based on gallium oxide”, Dissertation, Kyoto Univ.,March 2013

NPL 2: Raveen Kumaran, “New Solid State Laser Crystals Created byEpitaxial Growth”, A thesis submitted for the degree of doctor ofphilosophy, The University of British Columbia, September 2012

SUMMARY OF THE INVENTION Technical Problem

It is an object of the present invention to provide a semiconductorfilm, a sheet like object, and a semiconductor device that haveinhibited semiconductor properties, particularly leakage current, andhave excellent withstand voltage and heat dissipation.

Solution to Problem

As a result of keen examination to achieve the object, the presentinventors have successfully invented a crystalline semiconductor film,including a corundum structured oxide semiconductor as a majorcomponent, wherein the film has a film thickness of 1 μm or more.

In addition, the present inventors have made further research tosuccessfully manufacture a sheet like object, including a corundumstructured oxide semiconductor as a major component.

Still in addition, the present inventors manufactured a semiconductordevice using the crystalline semiconductor film or the sheet like objectand found that the semiconductor device thus obtained had inhibitedleakage current and had excellent withstand voltage and heatdissipation, and after learning the above various findings, have madefurther research to complete the present invention.

Advantageous Effects of Invention

The crystalline semiconductor film and the sheet like object of thepresent invention are excellent in semiconductor properties and thesemiconductor device of the present invention has inhibited leakagecurrent and is excellent in withstand voltage and heat dissipation.

DESCRIPTION OF THE DRAWINGS

The foregoing aspects and many of the attendant advantages of thisinvention will become more readily appreciated as the same become betterunderstood by reference to the following detailed description, whentaken in conjunction with the accompanying drawings, wherein:

FIG. 1 is a diagram schematically illustrating a preferred example of aSchottky barrier diode (SBD) of the present invention.

FIG. 2 is a diagram schematically illustrating another preferred exampleof a Schottky barrier diode (SBD) of the present invention.

FIG. 3 is a diagram schematically illustrating still another preferredexample of a Schottky barrier diode (SBD) of the present invention.

FIG. 4 is a diagram schematically illustrating a preferred example of ametal semiconductor field effect transistor (MESFET) of the presentinvention.

FIG. 5 is a diagram schematically illustrating a preferred example of ahigh electron mobility transistor (HEMT) of the present invention.

FIG. 6 is a diagram schematically illustrating a preferred example of ametal oxide semiconductor field effect transistor (MOSFET) of thepresent invention.

FIGS. 7A to 7C show schematic views illustrating part of a procedure ofmanufacturing the metal oxide semiconductor field effect transistor(MOSFET) in FIG. 6 .

FIG. 8 is a diagram schematically illustrating an example of a metaloxide semiconductor field effect transistor (MOSFET) of the presentinvention.

FIG. 9 is a diagram schematically illustrating a preferred example of astatic induction transistor (SIT) of the present invention.

FIG. 10 is a diagram schematically illustrating another preferredexample of a Schottky barrier diode (SBD) of the present invention.

FIG. 11 is a diagram schematically illustrating another preferredexample of a Schottky barrier diode (SBD) of the present invention.

FIG. 12 is a diagram schematically illustrating another preferredexample of a high electron mobility transistor (HEMT) of the presentinvention.

FIG. 13 is a diagram schematically illustrating another preferredexample of a metal oxide semiconductor field effect transistor (MOSFET)of the present invention.

FIG. 14 is a diagram schematically illustrating a preferred example of ajunction field effect transistor (JFET) of the present invention.

FIG. 15 is a diagram schematically illustrating a preferred example ofan insulated gate bipolar transistor (IGBT) of the present invention.

FIG. 16 is a diagram schematically illustrating a preferred example of alight emitting device (LED) of the present invention.

FIG. 17 is a diagram schematically illustrating another preferredexample of a light emitting device (LED) of the present invention.

FIG. 18 is a configuration diagram of a mist CVD apparatus used inExample.

FIGS. 19A to 19B show diagrams illustrating a susceptor used in Example.

FIG. 20 is a diagram illustrating relationship between cross sectionalareas of the susceptor and a supply pipe used in Example.

FIG. 21 is a graph illustrating relationship between a dopant contentratio in the liquid and a germanium content in the film in Example ofthe present invention.

FIG. 22 is a diagram illustrating a structure of a Schottky barrierdiode (SBD) in Example.

FIG. 23 is a diagram illustrating a result of SIMS analysis of agermanium doped semiconductor layer in Example.

FIG. 24 is a diagram illustrating a result of SIMS analysis of a silicondoped semiconductor layer in Example.

FIG. 25 is a diagram illustrating an X-ray diffraction image of afree-standing film obtained in Example.

FIG. 26 is a diagram illustrating a structure of another Schottkybarrier diode (SBD) in Example.

FIG. 27 is a diagram illustrating current-voltage characteristics of anSBD obtained in Example.

FIG. 28 is a diagram illustrating a structure of an MESFET fabricated inExample.

FIG. 29 is a diagram illustrating DC characteristics of the MESFETfabricated in Example, where the ordinate represents a drain current (A)and the abscissa represents a drain voltage (V).

FIG. 30 is a schematic block diagram of a mist CVD apparatus used inExamples.

FIG. 31 is a diagram illustrating results of forward current-voltagecharacteristics evaluation in Example.

FIG. 32 is a diagram illustrating results of reverse current-voltagecharacteristics evaluation in Example.

FIG. 33 is a diagram illustrating results of XRD in Example.

FIG. 34 illustrates a photograph of a film in Example.

FIG. 35 illustrates another photograph of a film in Example.

DESCRIPTION OF EMBODIMENTS

A crystalline semiconductor film of the present invention is acrystalline semiconductor film, including a corundum structured oxidesemiconductor as a major component, and the crystalline semiconductorfilm is not particularly limited as long as the film has a filmthickness of 1 μm or more. In the present invention, the film thicknessis preferably 2 μm or more, more preferably 3 μm or more, and mostpreferably 5 μm or more. In the present invention, the semiconductorfilm preferably has a film thickness of 7.6 μm or more. A film thicknessof 7.6 μm or more enables free standing of the crystalline semiconductorfilm. In the present invention, the film more preferably has a filmthickness of 10 μm or more and is most preferably a multilayer filmhaving a film thickness of 10 μm or more, in which the layers containthe same major component (e.g., a laminate of an n-type semiconductorlayer and an n+type semiconductor layer) because the semiconductorproperties are improved more. The shape of the crystalline semiconductorfilm is not particularly limited, but may be a quadrangular, circular,or polygonal or the like. The surface area of the crystallinesemiconductor film in the present invention is not particularly limited,but preferably 3 mm square or more (9 mm² or more), more preferably 5 mmsquare or more (25 mm² or more), and most preferably a diameter of 50 mmor more. In the present invention, use of mist CVD in specificconditions enables easy production of the crystalline semiconductor filmof 3 mm square or more, which has not been achieved conventionally.

The crystalline semiconductor film may be a single crystal film or maybe a polycrystalline film. In the present invention, the crystallinesemiconductor film is preferably a single crystal film that may containpolycrystal. The oxide semiconductor is not particularly limited as longas the semiconductor is a corundum structured oxide semiconductor.Examples of the oxide semiconductor include a metal oxide semiconductoror the like containing one or more types of metal selected from Al, Ga,In, Fe, Cr, V, Ti, Rh, Ni, and Co and the like. In the presentinvention, the oxide semiconductor preferably contains one or moreelements selected from indium, aluminum, and gallium as majorcomponents, more preferably contains at least indium or/and gallium asmajor components, and most preferably contains at least gallium as amajor component. In the present invention, “containing as a majorcomponent” means to contain the corundum structured oxide semiconductorat an atomic ratio of preferably 50% or more based on the entirecomponents of the crystalline semiconductor film, more preferably 70% ormore, and even more preferably 90% or more, and also means that thesemiconductor may be contained at 100%.

In the present invention, the oxide semiconductor is preferably α typeIn_(x)Al_(y)Ga_(z)O₃ (0≤X≤2, 0≤Z≤2, X+Y+Z=1.5 to 2.5 and 0<X or 0<Z).Preferred composition of α type In_(x)Al_(y)Ga_(z)O₃ as the oxidesemiconductor is not particularly limited as long as the objects of thepresent invention are not impaired. A total atomic ratio of gallium,indium, and aluminum in the metal elements contained in the crystallinesemiconductor film is preferably 0.5 or more and more preferably 0.8 ormore. Preferred composition of the oxide semiconductor containinggallium is preferably at an atomic ratio of gallium of 0.5 or more inthe metal elements contained in the crystalline semiconductor film andmore preferably 0.8 or more.

In the crystalline semiconductor film, a dopant may be contained. Thedopant is not particularly limited as long as the objects of the presentinvention are not impaired. Examples of the dopant include n typedopants, such as tin, germanium, silicon, titanium, zirconium, vanadium,and niobium, p type dopants, or the like. The dopant concentration maybe generally approximately from 1×10¹⁶/cm³ to 1×10²²/cm³. The dopantconcentration may be at low concentration of, for example, approximately1×10¹⁷/cm³ or less to make an n−type semiconductor or the like in thecase of, for example, an n type dopant. Further, according to thepresent invention, the dopant may be contained at high concentration ofapproximately 1×10²⁰/cm³ or more to make an n+type semiconductor or thelike in the case of, for example, an n type dopant. In the presentinvention, the n type dopant is preferably germanium, silicon, titanium,zirconium, vanadium, or niobium. For formation of an n−typesemiconductor layer, the concentration of germanium, silicon, titanium,zirconium, vanadium, or niobium in the crystalline semiconductor film ispreferably approximately from 1×10¹³ to 5×10¹⁷/cm³ and more preferablyapproximately from 1×10¹⁵ to 1×10¹⁷/cm³. For formation of an n+typesemiconductor layer using germanium, silicon, titanium, zirconium,vanadium, or niobium as the n type dopant, the concentration ofgermanium, silicon, titanium, zirconium, vanadium, or niobium in thecrystalline semiconductor film is preferably approximately from1×10²⁰/cm³ to 1×10²³/cm³ and more preferably approximately from1×10²⁰/cm³ to 1×10²¹/cm³. Germanium, silicon, titanium, zirconium,vanadium, or niobium is thus contained in the crystalline semiconductorfilm to make a crystalline semiconductor film more excellent inelectrical characteristics than the case of using tin as the dopant.

The crystalline semiconductor film may be formed directly on a basesubstrate or may be formed via another layer. Examples of such anotherlayer include a corundum structured crystalline thin film of anothercomposition, a crystalline thin film with of a structure other than thecorundum structure, an amorphous thin film, or the like. The structuremay be a single layer structure or may be a multilayer structure. Onelayer may have two or more crystal phases mixed therein. In the case ofhaving a multilayer structure, the crystalline semiconductor film in thepresent invention is configured by laminating, for example, aninsulating thin film and a conductive thin film, but not limited. In themultilayer structure configured by laminating an insulating thin filmand a conductive thin film, the insulating thin film and the conductivethin film may have the same composition or compositions different fromeach other. The thickness ratio of the conductive thin film to theinsulating thin film is not particularly limited, and the ratio of(thickness of the conductive thin film)/(thickness of the insulatingthin film) is preferably, for example, from 0.001 to 100 and morepreferably from 0.1 to 5. The more preferred ratio is specifically, forexample, 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3,1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 3, 4, and 5 and may range between anytwo values listed here.

In the present invention, by mist CVD using, for example, a susceptorillustrated in FIGS. 19A to 19B and 20 , an abnormal grain inhibitor, orthe like, the crystalline semiconductor film may be laminated directlyon the base substrate or via another layer.

<Base Substrate>

The base substrate is not particularly limited as long as it becomes asupport for the crystalline semiconductor film. While the base substratemay be an insulating substrate, a semiconductor substrate, or aconductive substrate, it is preferably an insulating substrate and alsopreferably a substrate having a metal film on a surface. In the presentinvention, the base substrate is also preferably a substrate containingcorundum structured crystals as a major component or a substratecontaining β-gallic structured crystals as a major component. Thesubstrate containing corundum structured crystals as a major componentis not particularly limited as long as the substrate contains corundumstructured crystals at a composition ratio in the substrate of 50% ormore. In the present invention, the crystals are preferably contained at0% or more and more preferably at 90% or more. Examples of the substratecontaining corundum structured crystals as a major component include asapphire substrate (e.g., c-plane sapphire substrate), an α type galliumoxide substrate, or the like. The substrate containing β-gallicstructured crystals as a major component is not particularly limited aslong as the substrate contains the β-gallic structured crystals at acomposition ratio in the substrate of 50% or more. In the presentinvention, the crystals are preferably contained at 0% or more and morepreferably at 90% or more. Examples of the substrate containing 0-gallicstructured crystals as a major component include a β-Ga₂O₃ substrate, amixed crystal substrate containing Ga₂O₃ and Al₂O₃ where Al₂O₃ is morethan 0 wt % and 60 wt % or less, or the like. Examples of other basesubstrates include hexagonal structured substrates (e.g., SiC substrate,ZnO substrate, GaN substrate), or the like. The crystallinesemiconductor film is preferably formed directly on the hexagonalstructured substrate or via another layer (e.g., buffer layer, etc.).The thickness of the base substrate in the present invention is notparticularly limited, but preferably from 50 to 2000 μm and morepreferably from 200 to 800 μm.

In the case of the base substrate having a metal film on a surface, themetal film may be provided on all or part of a substrate surface and themetal film may be provided in a mesh or dotted form. The thickness ofthe metal film is not particularly limited, but preferably from 10 to1000 nm and more preferably from 10 to 500 nm. Examples of the componentmaterial for the metal film include metal, such as platinum (Pt), gold(Au), palladium (Pd), silver (Ag), chromium (Cr), copper (Cu), iron(Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb),manganese (Mn), molybdenum (Mo), aluminum (Al), and hafnium (Hf), alloysthereof, or the like. The metal is preferably uniaxially oriented. Theuniaxially oriented metals include any metals whose crystal orientationis directed to a specific direction (the film thickness direction andthe film in-plane direction, the film thickness direction), and includemetals which are oriented preferentially to one axis. In the presentinvention, the orientation is preferably uniaxial in the film thicknessdirection. Whether the orientation is uniaxial may be confirmed by X-raydiffraction. For example, the uniaxial orientation may be determinedwhen an integrated intensity ratio of a peak derived from a uniaxiallyoriented crystal face to a peak derived from another crystal face isgreater (preferably not less than twice greater and more preferably notless than an order of magnitude greater) compared with an integratedintensity ratio of a peak derived from a uniaxially oriented crystalface of randomly oriented powder of the same crystal to a peak derivedfrom another crystal face.

In the present invention, the base substrate is preferably a sapphiresubstrate (e.g., c-plane sapphire substrate), an α type gallium oxidesubstrate, a (3-Ga₂O₃ substrate, a mixed crystal substrate containingGa₂O₃ and Al₂O₃ where Al₂O₃ is more than 0 wt % and 60 wt % or less, orany of these substrates having a metal film formed on a surface. Use ofsuch a preferred base substrate enables more reduction in the carboncontent ratio, the carrier concentration, and the half width of theimpurities in the crystalline semiconductor film compared with the caseof using another base substrate.

The mist CVD is not particularly limited as long as the film formationmethod includes, (1) a step of atomizing a raw material, for example,using an ultrasonic vibration transducer to produce mist, (2) a step ofsupplying a carrier gas, and (3) a step of delivering the mist to thebase substrate retained by the susceptor with the carrier gas for filmformation. More specific examples of the method of producing mistinclude mist epitaxy, mist CVD, or the like.

The step (1) is not particularly limited as long as a raw material isatomized to produce mist. For the step (1), a mist generator may be usedthat atomizes the raw material to produce mist. The mist generator isnot particularly limited as long as the generator is capable ofatomizing the raw material to produce mist. The generator may be a knownone while, in the present invention, the generator preferably atomizesthe raw material to produce mist using ultrasonic waves. The rawmaterial is described later.

The step (2) is not particularly limited as long as a carrier gas issupplied. The carrier gas is not particularly limited as long as it isgaseous and capable of delivering the mist produced by atomizing the rawmaterial onto a substrate. Examples of the carrier gas are notparticularly limited, but include an oxygen gas, a nitrogen gas, anargon gas, a forming gas, or the like.

The step (3) is not particularly limited as long as the mist isdelivered to the base substrate retained by a susceptor using thecarrier gas for film formation. For the step (3), a tube furnace may bepreferably used that is capable of delivering the mist to the substrateusing the carrier gas for film formation in the supply pipe.

In the present invention, for film formation in the supply pipe in thestep (3), the crystalline semiconductor film is preferably formed usinga susceptor illustrated in, for example, FIGS. 19 and 20 as thesusceptor mentioned above.

FIGS. 19A to 19B illustrate an embodiment of the susceptor. A susceptor51 illustrated in FIGS. 19A to 19B is provided with a mist accelerator52, a substrate holder 53, and a support unit 54. The support unit 54 isin a rod shape and configured to have a contact angle of the supportunit 54 with a supply pipe 55 of approximately 90° by changing the angleof the unit at some point. Although such configuration improves thestability of the susceptor 51, the shape of the support unit 54 in thepresent invention is not particularly limited and various shapes may beapplied as appropriate.

FIG. 19A illustrates a cross section inside the supply pipe toward thesubstrate in the direction from upstream to downstream of the mist. Itis seen from the drawing that the substrate-side surface of thesusceptor has an outer circumference in a semicircular shape, which is ashape approximately identical to the inner circumference of the supplypipe. FIG. 19B illustrates cross sections of the supply pipe, thesubstrate, and the susceptor taking the upstream of the mist on the leftand the downstream on the right. Although the mist is prone toprecipitate in the supply pipe due to its properties, the susceptor 51is configured to have the inclined mist accelerator 52 to raise theprecipitated mist by acceleration, thereby delivering the mist onto thesubstrate.

FIG. 20 illustrates, in the supply pipe 55, a region for the susceptorand the substrate illustrated in FIGS. 19A to 19B as asubstrate-susceptor region 61 and a region to exhaust unreacted mist asan exhaust region 62, showing the relationship between a total area ofthe susceptor and the substrate and an area of the exhaust region. Inthe present invention, as illustrated in FIG. 20 , in the cross sectioninside the supply pipe divided into a susceptor region occupied by thesusceptor, a region for the substrate, and the exhaust region to exhaustunreacted mist, the total area of the susceptor region and the substrateis preferably greater than the area of the exhaust region. Use of such apreferred susceptor enables acceleration of the mist on the substrate toobtain a more homogeneous and thicker crystalline semiconductor film.

For the crystalline semiconductor film formation, a dopant may be usedto perform doping. In the present invention, doping is generallyperformed by incorporating an abnormal grain inhibitor into the rawmaterial. The doping by incorporating an abnormal grain inhibitor intothe raw material enables production of a crystalline semiconductor filmexcellent in surface smoothness. The amount of doping is notparticularly limited as long as the objects of the present invention arenot impaired, and preferably at a molar ratio from 0.01 to 10% in theraw material and more preferably from 0.1 to 5%.

The abnormal grain inhibitor means to have an effect of inhibitingby-product particles in the film formation process. The inhibitor is notparticularly limited as long as the crystalline semiconductor film has asurface roughness (Ra) of, for example, 0.1 μm or less. In the presentinvention, the abnormal grain inhibitor is preferably made from at leastone selected from Br, I, F, and Cl. For stable film formation,introduction of Br or I in the film as the abnormal grain inhibitorenables inhibition of deterioration of the surface roughness due toabnormal grain growth. Although the amount of the abnormal graininhibitor is not particularly limited as long as abnormal grains areinhibited, the amount is preferably 50% or less at a volume ratio in araw-material solution, more preferably 30% or less, and most preferablyin a range from 1 to 30%. Use of the abnormal grain inhibitor in such apreferred range enables its function as an abnormal grain inhibitor, andthe abnormal grain growth in the crystalline semiconductor film is thusinhibited to smooth the surface.

A method of forming a crystalline semiconductor film is not particularlylimited as long as the objects of the present invention are notimpaired. The film may be formed by reaction of a raw material bycombining, for example, a gallium compound with an indium compound, analuminum compound, or the like as desired in accordance with thecomposition of the crystalline semiconductor film. This enables crystalgrowth of the crystalline semiconductor film on the base substrate fromthe base substrate side. The gallium compound may be a product usinggallium metal as starting material to be changed into a gallium compoundimmediately before film formation. Examples of the gallium compoundinclude organic metal complexes (e.g., acetyl acetylacetonato complex,etc.), halides (e.g., fluoride, chloride, bromide, iodide, etc.), or thelike of gallium, and in the present invention, a halide (e.g., fluoride,chloride, bromide, iodide, etc.) is preferably used. Film formation bymist CVD using a halide as the raw material compound enables substantialexclusion of carbon from the crystalline semiconductor film.

More specifically, the crystalline semiconductor film may be formed bysupplying raw material microparticles generated from a raw-materialsolution in which a raw material compound is dissolved to a filmformation chamber and reacting the raw material compound in the filmformation chamber using the susceptor. The solvent of the raw-materialsolution is not particularly limited, but preferably water, a hydrogenperoxide solution, or an organic solvent. In the present invention, theraw material compound is generally reacted in the presence of a dopantraw material. The dopant raw material is preferably incorporated in theraw-material solution to be microparticulated together with orseparately from the raw material compound. The amount of carboncontained in the crystalline semiconductor film is thus less than thatin the dopant, and preferably carbon is not substantially contained inthe crystalline semiconductor film. The crystalline semiconductor filmof the present invention also preferably contains halogen (preferablyBr) to form a good semiconductor structure. Examples of the dopant rawmaterial include simple substances of metal, such as germanium, silicon,titanium, zirconium, vanadium, and niobium, compounds thereof (e.g.,halides, oxides, etc.), or the like.

Film formation as above enables industrially advantageous production ofa crystalline semiconductor film having a film thickness of 1 μm ormore. In the present invention, the film thickness of 1 μm or more maybe formed by appropriately adjusting film formation time.

In the present invention, annealing may be performed after filmformation. The temperature for annealing is not particularly limited,but preferably 600° C. or less and more preferably 550° C. or less.Annealing at such a preferred temperature more preferably enablesadjustment of the carrier concentration in the crystalline semiconductorfilm. While the annealing time is not particularly limited as long asthe objects of the present invention are not impaired, the time ispreferably from 10 seconds to 10 hours and more preferably from 10seconds to 1 hour.

The base substrate may be peeled off from the crystalline semiconductorfilm. The peeling means is not particularly limited as long as theobjects of the present invention are not impaired and may be knownmeans. Examples of the peeling means include means of peeling byapplying mechanical impact, means of peeling by applying heat to utilizethermal stress, means of peeling by applying vibration, such asultrasonic waves, means of peeling by etching, or the like. Such peelingenables production of the crystalline semiconductor film as afree-standing film.

For the base substrate having a metal film formed on a surface, peelingmay be subjected only to the substrate portion and the metal film mayremain on the semiconductor layer surface. The metal film remained onthe semiconductor layer surface enables facilitation and improvement ofelectrode formation on the semiconductor surface.

The film formation may be repeated, and the repeat of film formationallows the film thickness to be thicker and also enables production of asheet like object containing the corundum structured oxide semiconductoras a major component. In the present invention, a crystallinesemiconductor film may be formed again on the free-standing film.

In the present invention, the above film formation enables production ofa sheet like object having a thickness of 7.6 μm or more, preferably 10μm or more, more preferably 15 μm or more, and most preferably 50 μm ormore. The sheet like object is allowed to be used not only as asemiconductor layer but also as a substrate.

The crystalline semiconductor film and the sheet like object have asemiconductor structure useful for a semiconductor device. In thepresent invention, the crystalline semiconductor film or the sheet likeobject may be used for a semiconductor device as a semiconductorstructure directly or by further treating, such as processing, asdesired. When the semiconductor structure is used for a semiconductordevice, the semiconductor structure of the present invention may bedirectly used for the semiconductor device or may be used by furtherforming another layer (e.g., insulating layer, semi-insulating layer,semiconductor layer, buffer layer, intermediate layer, etc.) or thelike.

The semiconductor structure of the present invention is useful for asemiconductor device and is particularly useful for a power device.Semiconductor devices may be classified into lateral elements (lateraldevices) having electrodes formed on one side of the semiconductor layerand vertical elements (vertical devices) having electrodes respectivelyon both sides of front and rear of the semiconductor layer. In thepresent invention, the semiconductor structure may be preferably usedfor a lateral device and a vertical device, and among all, the structureis preferably used for a vertical device. Examples of the semiconductordevice include a Schottky barrier diode (SBD), a metal semiconductorfield effect transistor (MESFET), a high electron mobility transistor(HEMT), a metal oxide semiconductor field effect transistor (MOSFET), astatic induction transistor (SIT), a junction field effect transistor(JFET), an insulated gate bipolar transistor (IGBT), a light emittingdiode, or the like. In the present invention, the semiconductor deviceis preferably an SBD, a MOSFET, an SIT, a JFET, or an IGBT and morepreferably an SBD, a MOSFET, or an SIT. In the present invention, thesemiconductor device may exclude a p type semiconductor layer.

The following descriptions are given to preferred examples of acrystalline semiconductor film with the semiconductor structure appliedto an n type semiconductor layer (n+type semiconductor, n−typesemiconductor, etc.) with reference to the drawings while the presentinvention is not limited to these examples. As long as the objects ofthe present invention are not impaired, the semiconductor devices listedbelow may contain still another layer (e.g., insulating layer,semi-insulating layer, conductor layer, semiconductor layer, bufferlayer, intermediate layer, etc.) and also a buffer layer may be omittedappropriately.

(SBD)

FIG. 1 illustrates an example of a Schottky barrier diode (SBD)according to the present invention. The SBD in FIG. 1 is provided withan n−type semiconductor layer 101 a, an n+type semiconductor layer 101b, a Schottky electrode 105 a, and an ohmic electrode 105 b.

Materials for the Schottky electrode and the ohmic electrode may beknown electrode materials. Examples of such an electrode materialinclude metal, such as Al, Mo, Co, Zr, Sn, Nb, Fe, Cr, Ta, Ti, Au, Pt,V, Mn, Ni, Cu, Hf, W, Ir, Zn, In, Pd, Nd, and Ag, and alloys thereof,metal oxide conductive films, such as tin oxide, zinc oxide, indiumoxide, indium tin oxide (ITO), and indium zinc oxide (IZO), organicconductive compounds, such as polyaniline, polythiophene, andpolypyrrole, and mixtures thereof, or the like.

The Schottky electrode and the ohmic electrode may be formed by knownmeans, such as vacuum deposition and sputtering, for example. Morespecifically, the Schottky electrode may be formed by, for example,laminating a layer of Mo and a layer of Al and patterning the layer ofMo and the layer of Al using a photolithography technique.

When reverse bias is applied to the SBD in FIG. 1 , a depletion layer,not shown, expands in the n type semiconductor layer 101 a to make ahigh voltage SBD. When forward bias is applied, electrons flow from theohmic electrode 105 b to the Schottky electrode 105 a. The SBD thususing the semiconductor structure is excellent for high voltage and highcurrent applications, achieves high switching speed, and excellent inwithstand voltage and reliability.

FIG. 2 illustrates another example of a Schottky barrier diode (SBD)according to the present invention. In addition to the configuration ofthe SBD in FIG. 1 , the SBD in FIG. 2 is further provided with aninsulating layer 104. More specifically, this SBD is provided with ann−type semiconductor layer 101 a, an n+type semiconductor layer 101 b, aSchottky electrode 105 a, an ohmic electrode 105 b, and an insulatinglayer 104.

Examples of a material for the insulating layer 104 include GaO, AlGa0,InAlGaO, AlInZnGaO₄, AlN, Hf₂O₃, SiN, SiON, Al₂O₃, MgO, GdO, SiO₂,Si₃N₄, or the like. In the present invention, the material preferablyhas a corundum structure. Use of the corundum structured insulator forthe insulating layer enables good development of the functions ofsemiconductor properties at the interface. The insulating layer 104 isprovided between the n−type semiconductor layer 101 a and the Schottkyelectrode 105 a. The insulating layer may be formed by known means, suchas sputtering, vacuum deposition, and CVD, for example.

Formation, materials, or the like for the Schottky electrode and theohmic electrode are same as those in the case of the SBD in FIG. 1above. The electrodes may be formed by known means, such as sputtering,vacuum deposition, and CVD, for example, and made from metal, such asAl, Mo, Co, Zr, Sn, Nb, Fe, Cr, Ta, Ti, Au, Pt, V, Mn, Ni, Cu, Hf, W,Ir, Zn, In, Pd, Nd, and Ag, and alloys thereof, metal oxide conductivefilms, such as tin oxide, zinc oxide, indium oxide, indium tin oxide(ITO), and indium zinc oxide (IZO), organic conductive compounds, suchas polyaniline, polythiophene, and polypyrrole, and mixtures thereof, orthe like.

The SBD in FIG. 2 has, compared with the SBD in FIG. 1 , even moreexcellent in insulating properties and higher current controllability.

FIG. 3 illustrates still another SBD example of a Schottky barrier diode(SBD) according to the present invention. The SBD in FIG. 3 is greatlydifferent from the configuration of the SBDs in FIGS. 1 and 2 in thepoints of having a trench structure and including a semi-insulatinglayer 103. The SBD in FIG. 3 is provided with an n−type semiconductorlayer 101 a, an n+type semiconductor layer 101 b, a Schottky electrode105 a, an ohmic electrode 105 b, and the semi-insulating layer 103. ThisSBD is capable of great reduction in leakage current and great reductionin on resistance while maintaining the withstand voltage.

The semi-insulating layer 103 may be configured with a semi-insulator.Examples of the semi-insulator include those containing a semi-insulatordopant, such as magnesium (Mg), ruthenium (Ru), iron (Fe), beryllium(Be), cesium (Cs), strontium, and barium, those undoped, or the like.

(MESFET)

FIG. 4 illustrates an example of a metal semiconductor field effecttransistor

(MESFET) according to the present invention. The MESFET in FIG. 4 isprovided with an n−type semiconductor layer 111 a, an n+typesemiconductor layer 111 b, a buffer layer 118, a semi-insulating layer114, a gate electrode 115 a, a source electrode 115 b, and a drainelectrode 115 c.

Materials for the gate electrode, the drain electrode, and the sourceelectrode may be known electrode materials. Examples of the electrodematerials include metal, such as Al, Mo, Co, Zr, Sn, Nb, Fe, Cr, Ta, Ti,Au, Pt, V, Mn, Ni, Cu, Hf, W, Ir, Zn, In, Pd, Nd, and Ag, and alloysthereof, metal oxide conductive films, such as tin oxide, zinc oxide,indium oxide, indium tin oxide (ITO), and indium zinc oxide (IZO),organic conductive compounds, such as polyaniline, polythiophene, andpolypyrrole, and mixtures thereof, or the like. The gate electrode, thedrain electrode, and the source electrode may be formed by known means,such as vacuum deposition and sputtering, for example.

The semi-insulating layer 114 may be configured with a semi-insulator.Examples of the semi-insulator include those containing a semi-insulatordopant, such as magnesium (Mg), ruthenium (Ru), iron (Fe), beryllium(Be), cesium (Cs), strontium, and barium, those undoped, or the like.

In the MESFET in FIG. 4 , a good depletion layer is formed under thegate electrode, and the current flowing from the drain electrode to thesource electrode is thus efficiently controlled.

(HEMT)

FIG. 5 illustrates an example of a high electron mobility transistor(HEMT) according to the present invention. The HEMT in FIG. 5 isprovided with an n type semiconductor layer 121 a with a wide band gap,an n type semiconductor layer 121 b with a narrow band gap, an n+typesemiconductor layer 121 c, a semi-insulating layer 124, a buffer layer128, a gate electrode 125 a, a source electrode 125 b, and a drainelectrode 125 c.

Materials for the gate electrode, the drain electrode, and the sourceelectrode may be respective known electrode materials. Examples of theelectrode materials include metal, such as Al, Mo, Co, Zr, Sn, Nb, Fe,Cr, Ta, Ti, Au, Pt, V, Mn, Ni, Cu, Hf, W, Ir, Zn, In, Pd, Nd, and Ag,and alloys thereof, metal oxide conductive films, such as tin oxide,zinc oxide, indium oxide, indium tin oxide (ITO), and indium zinc oxide(IZO), organic conductive compounds, such as polyaniline, polythiophene,and polypyrrole, and mixtures thereof, or the like. The gate electrode,the drain electrode, and the source electrode may be formed by knownmeans, such as vacuum deposition and sputtering, for example.

The n type semiconductor layers under the gate electrode are configuredat least with the layer 121 a with a wide band gap and the layer 121 bwith a narrow band gap and the semi-insulating layer 124 is configuredwith a semi-insulator. Examples of the semi-insulator include thosecontaining a semi-insulator dopant, such as ruthenium (Ru) and iron(Fe), those undoped, or the like.

In the HEMT in FIG. 5 , a good depletion layer is formed under the gateelectrode, and the current flowing from the drain electrode to thesource electrode is thus efficiently controlled. Further, in the presentinvention, formation of a recess structure enables normally-offcharacteristics.

(MOSFET)

FIG. 6 illustrates an example of a MOSFET as the semiconductor device ofthe present invention. The MOSFET in FIG. 6 is a trench MOSFET andprovided with an n−type semiconductor layer 131 a, n+type semiconductorlayers 131 b and 131 c, a gate insulating film 134, a gate electrode 135a, a source electrode 135 b, and a drain electrode 135 c.

On the drain electrode 135 c, the n+type semiconductor layer 131 bhaving a thickness, for example, from 100 nm to 100 μm is formed. On then+type semiconductor layer 131 b, the n−type semiconductor layer 131 ahaving a thickness, for example, from 100 nm to 100 μm is formed.Further, on the n−type semiconductor layer 131 a, the n+typesemiconductor layer 131 c is formed. On the n+type semiconductor layer131 c, the source electrode 135 b is formed.

In the n−type semiconductor layer 131 a and the n+type semiconductorlayer 131 c, a plurality of trench grooves are formed that has a depthreaching at some point of the n−type semiconductor layer 131 a throughthe n+semiconductor layer 131 c. The gate electrode 135 a is formedembedded in the trench grooves via the gate insulating film 134 having athickness, for example, from 10 nm to 1 μm.

In an on state of the MOSFET in FIG. 6 , when a voltage is appliedbetween the source electrode 135 b and the drain electrode 135 c to givea voltage, positive to the source electrode 135 b, to the gate electrode135 a, channel layers are formed on the sides of the n−typesemiconductor layer 131 a and the electrons are injected into the n−typesemiconductor layer 131 a to be turned on. In an off state, the voltageof the gate electrode is made 0 V, thereby no longer producing thechannel layers. The n−type semiconductor layer 131 a is then filled witha depletion layer to be turned off.

FIGS. 7A to 7C illustrates part of a procedure of manufacturing theMOSFET in FIG. 6 . For example, using a semiconductor structure asillustrated in FIG. 7A, an etching mask is provided in a predeterminedregion of the n−type semiconductor layer 131 a and the n+typesemiconductor layer 131 c. Using the etching mask as a mask, anisotropicetching is further performed by reactive ion etching or the like toform, as illustrated in FIG. 7B, trench grooves with a depth from thesurface of the n+type semiconductor layer 131 c to some point of then−type semiconductor layer 131 a. Then, as illustrated in FIG. 7C, thegate insulating film 134 with a thickness, for example, from 50 nm to 1μm is formed on the sides and the bottom of the trench grooves usingknown means, such as thermal oxidation, vacuum deposition, sputtering,and CVD. Then, using CVD, vacuum deposition, sputtering, or the like, agate electrode material 135 a, such as polysilicon, for example, isformed on the trench grooves with a thickness equal to or less than thatof the n−type semiconductor layer.

Then, using known means, such as vacuum deposition, sputtering, and CVD,the source electrode 135 b is formed on the n+type semiconductor layer131 c and the drain electrode 135 c is formed on the n+typesemiconductor layer 131 b to manufacture a power MOSFET. Electrodematerials for the source electrode and the drain electrode may berespective known electrode materials, and examples of the electrodematerials include metal, such as Al, Mo, Co, Zr, Sn, Nb, Fe, Cr, Ta, Ti,Au, Pt, V, Mn, Ni, Cu, Hf, W, Ir, Zn, In, Pd, Nd, and Ag, and alloysthereof, metal oxide conductive films, such as tin oxide, zinc oxide,indium oxide, indium tin oxide (ITO), and indium zinc oxide (IZO),organic conductive compounds, such as polyaniline, polythiophene, andpolypyrrole, and mixtures thereof, or the like.

The MOSFET thus obtained is even more excellent in withstand voltagecompared with conventional trench MOSFETs. Although FIG. 6 illustratesthe example of the trench vertical MOSFET, the present invention is notlimited to this and is applicable to various forms of MOSFET. Forexample, the trench grooves in FIG. 6 may be formed deeper down to thebottom of the n−type semiconductor layer 131 a to reduce seriesresistance. FIG. 8 illustrates an example of a lateral MOSFET. TheMOSFET in FIG. 8 is provided with an n−type semiconductor layer 131 a, afirst n+type semiconductor layer 131 b, a second n+type semiconductorlayer 131 c, a gate insulating film 134, a gate electrode 135 a, asource electrode 135 b, a drain electrode 135 c, a buffer layer 138, anda semi-insulating layer 139. As illustrated in FIG. 8 , the n+typesemiconductor layers are embedded in the n−type semiconductor layer toenable better flow of a current compared with that in other lateralMOSFETs.

(SIT)

FIG. 9 illustrates an example of an SIT as the semiconductor device ofthe present invention. The SIT in FIG. 9 is provided with an n−typesemiconductor layer 141 a, n+type semiconductor layers 141 b and 141 c,gate electrodes 145 a, source electrodes 145 b, and a drain electrode145 c.

On the drain electrode 145 c, the n+type semiconductor layer 141 bhaving a thickness, for example, from 100 nm to 100 μm is formed. On then+type semiconductor layer 141 b, the n−type semiconductor layer 141 ahaving a thickness, for example, from 100 nm to 100 μm is formed.Further, on the n−type semiconductor layer 141 a, the n+typesemiconductor layer 141 c is formed. On the n+type semiconductor layer141 c, the source electrodes 145 b are formed.

In the n−type semiconductor layer 141 a, a plurality of trench groovesare formed that has a depth reaching at some point of then−semiconductor layer 141 a through the n+semiconductor layer 141 c. Onthe n−type semiconductor layer in the trench grooves, gate electrodes145 a are formed.

In an on state of the SIT in FIG. 9 , when a voltage is applied betweenthe source electrodes 145 b and the drain electrode 145 c to give avoltage, positive to the source electrodes 145 b, to the gate electrodes145 a, a channel layer is formed in the n−type semiconductor layer 141 aand the electrons are injected into the n−type semiconductor layer 141 ato be turned on. In an off state, the voltage of the gate electrode ismade 0 V, thereby no longer producing the channel layers. The n−typesemiconductor layer 141 a is then filled with a depletion layer to beturned off.

The SIT illustrated in FIG. 9 may be manufactured by known means. Forexample, using the semiconductor structure illustrated in FIG. 7A, inthe same manner as the procedure of manufacturing an MOSFET in FIGS. 7Ato 7C above, an etching mask is provided in a predetermined region ofthe n−type semiconductor layer 141 a and the n+type semiconductor layer141 c. Using the etching mask as a mask, anisotropic etching isperformed by, for example, reactive ion etching or the like to formtrench grooves with a depth from the surface of the n+type semiconductorlayer 141 c to some point of the n-type semiconductor layer 141 a. Then,by CVD, vacuum deposition, sputtering, or the like, a gate electrodematerial, such as polysilicon, for example, is formed on the trenchgrooves with a thickness equal to or less than that of the n−typesemiconductor layer. Then, using known means, such as CVD, vacuumdeposition, and sputtering, the source electrodes 145 b are formed onthe n+type semiconductor layer 141 c and the drain electrode 145 c isformed on the n+type semiconductor layer 141 b to manufacture the SITillustrated in FIG. 9 .

Electrode materials for the source electrodes and the drain electrodemay be respective known electrode materials, and examples of theelectrode materials include metal, such as Al, Mo, Co, Zr, Sn, Nb, Fe,Cr, Ta, Ti, Au, Pt, V, Mn, Ni, Cu, Hf, W, Ir, Zn, In, Pd, Nd, and Ag,and alloys thereof, metal oxide conductive films, such as tin oxide,zinc oxide, indium oxide, indium tin oxide (ITO), and indium zinc oxide(IZO), organic conductive compounds, such as polyaniline, polythiophene,and polypyrrole, and mixtures thereof, or the like.

Although a p type semiconductor is not used in the above example, thepresent invention is not limited to such an example and a p typesemiconductor may be used. FIGS. 10 to 16 illustrate examples using a ptype semiconductor. These semiconductor devices may be manufactured inthe manner same as that in the above example. The p type semiconductormay be of the material same as that for the n type semiconductor butcontaining a p type dopant, or may be different from that.

FIG. 10 illustrates a preferred example of a Schottky barrier diode(SBD) provided with an n−type semiconductor layer 101 a, an n+typesemiconductor layer 101 b, a p type semiconductor layer 102, aninsulating layer 104, a Schottky electrode 105 a, and an ohmic electrode105 b.

FIG. 11 illustrates a preferred example of a trench Schottky barrierdiode (SBD) provided with an n−type semiconductor layer 101 a, an n+typesemiconductor layer 101 b, a p type semiconductor layer 102, a Schottkyelectrode 105 a, and an ohmic electrode 105 b. Such a trench SBD enablesgreat reduction in the leakage current and great reduction in the onresistance while maintaining withstand voltage.

FIG. 12 illustrates a preferred example of a high electron mobilitytransistor (HEMT) provided with an n type semiconductor layer 121 a witha wide band gap, an n type semiconductor layer 121 b with a narrow bandgap, an n+type semiconductor layer 121 c, a p type semiconductor layer123, a gate electrode 125 a, a source electrode 125 b, a drain electrode125 c, and a substrate 129.

FIG. 13 illustrates a preferred example of a metal oxide semiconductorfield effect transistor (MOSFET) provided with an n−type semiconductorlayer 131 a, a first n+type semiconductor layer 131 b, a second n+typesemiconductor layer 131 c, a p type semiconductor layer 132, a p+typesemiconductor layer 132 a, a gate insulating film 134, a gate electrode135 a, a source electrode 135 b, and a drain electrode 135 c. The p+typesemiconductor layer 132 a may be a p type semiconductor layer and may besame as the p type semiconductor layer 132.

FIG. 14 illustrates a preferred example of a junction field effecttransistor (JFET) provided with an n−type semiconductor layer 141 a, afirst n+type semiconductor layer 141 b, a second n+type semiconductorlayer 141 c, a p type semiconductor layer 142, gate electrodes 145 a,source electrodes 145 b, and the drain electrode 145 c.

FIG. 15 illustrates a preferred example of an insulated gate bipolartransistor (IGBT) provided with an n type semiconductor layer 151, ann−type semiconductor layer 151 a, n+type semiconductor layers 151 b, a ptype semiconductor layer 152, a gate insulating film 154, a gateelectrode 155 a, emitter electrodes 155 b, and a collector electrode 155c.

(LED)

FIG. 16 illustrates an example of a light emitting diode (LED) as thesemiconductor device of the present invention. The semiconductor lightemitting device in FIG. 16 is provided with an n type semiconductorlayer 161 on a second electrode 165 b, and on the n type semiconductorlayer 161, a light emitting layer 163 is laminated. Then, on the lightemitting layer 163, a p type semiconductor layer 162 is laminated. Onthe p type semiconductor layer 162, a translucent electrode 167 isprovided that transmits light produced by the light emitting layer 163.On the translucent electrode 167, a first electrode 165 a is laminated.The semiconductor light emitting device in FIG. 16 may be covered with aprotective layer except for the electrode portions.

Examples of the material for the translucent electrode includeconductive materials of oxide containing indium (In) or titanium (Ti) orthe like. More specific examples include In₂O₃, ZnO, SnO₂, Ga₂O₃, TiO₂,and CeO₂, mixed crystal of two or more of them, those doped by them, orthe like. Such a material is provided by known means, such assputtering, to form a translucent electrode. After forming thetranslucent electrode, thermal annealing may be applied to make thetranslucent electrode transparent.

According to the semiconductor light emitting device in FIG. 16 , wherethe first electrode 165 a is a cathode and the second electrode 165 b isan anode, a flow of current via both of them to the p type semiconductorlayer 162, the light emitting layer 163, and the n type semiconductorlayer 161 causes the light emitting layer 163 to emit light.

Examples of the materials for the first electrode and the secondelectrode include metal, such as Al, Mo, Co, Zr, Sn, Nb, Fe, Cr, Ta, Ti,Au, Pt, V, Mn, Ni, Cu, Hf, W, Ir, Zn, In, Pd, Nd, and Ag, and alloysthereof, metal oxide conductive films, such as tin oxide, zinc oxide,indium oxide, indium tin oxide (ITO), and indium zinc oxide (IZO),organic conductive compounds, such as polyaniline, polythiophene, andpolypyrrole, and mixtures thereof, or the like. A method of forming theelectrodes is not particularly limited. The electrodes may be formed onthe substrate in accordance with a method appropriately selected byconsidering suitability for the above material from printing process,wet process such as spraying and coating, physical process such asvacuum deposition, sputtering, and ion plating, chemical process such asCVD and plasma CVD, or the like.

FIG. 17 illustrates another embodiment of a light emitting device. Inthe light emitting device in FIG. 17 , an n type semiconductor layer 161is laminated on a substrate 169. A p type semiconductor layer 162, alight emitting layer 163, and part of the n type semiconductor layer 161are notched to expose the n type semiconductor layer 161. On part of theexposed surface of the semiconductor layer, the second electrode 165 bis laminated.

EXAMPLE

Examples of the present invention are described below.

Example 1

1. Film Formation Apparatus

With reference to FIG. 18 , a mist CVD apparatus 19 used in the presentExample is described. The mist CVD apparatus 19 was provided with asusceptor 21 to place a substrate 20, carrier gas supply means 22 tosupply a carrier gas, a flow regulating valve 23 to regulate a flow rateof the carrier gas discharged from the carrier gas supply means 22, amist generator 24 to store a raw-material solution 24 a, a container 25to keep water 25 a, an ultrasonic vibration transducer 26 mounted at abottom of the container 25, a supply pipe 27 of a quartz pipe with aninner diameter of 40 mm, and a heater 28 placed surrounding the supplypipe 27. The susceptor 21 was made from quartz and had a surface toplace the substrate 20 inclined from the horizontal plane. Both thesupply pipe 27 and the susceptor 21 made from quartz inhibit mixing ofimpurities derived from the apparatus into the film formed on thesubstrate 20.

As the susceptor 21, the susceptor 51 illustrated in FIGS. 19A to 19Bwas used. The susceptor had a tilt angle of 45°, and the susceptor inthe supply pipe was configured to have a total area of the substratethat, as illustrated in FIGS. 19A to 19B, gradually increased thesusceptor region and gradually decreased the exhaust region. Asillustrated in FIG. 20 , the susceptor region was configured to begreater than the exhaust region.

2. Preparation of Raw-Material Solution

An aqueous solution of gallium bromide and germanium oxide was preparedat an atomic ratio of germanium to gallium of 1:0.05. At this point, a48% hydrobromic acid solution was contained at a volume ratio of 10%. InCondition 1, the concentration of germanium oxide was 5.0×10⁻³ mol/L.

The raw-material solution 24 a was stored in the mist generator 24.

3. Film Formation Preparation

Then, on the susceptor 21, a c-plane sapphire substrate in a 10 mmsquare with a thickness of 600 μm was placed as the substrate 20. Theheater 28 was activated to raise a temperature in the supply pipe 27 to500° C. The flow regulating valve 23 was then opened to supply a carriergas from the carrier gas supply means 22 into the supply pipe 27. Afterthe carrier gas sufficiently substituted for the atmosphere in thesupply pipe 27, the flow rate of the carrier gas was regulated at 5L/min. As the carrier gas, an oxygen gas was used.

4. Film Formation

The ultrasonic vibration transducer 26 was then vibrated at 2.4 MHz. Thevibration propagated through the water 25 a to the raw-material solution24 a, thereby microparticulating the raw-material solution 24 a toproduce raw material microparticles.

The raw material microparticles were introduced to the supply pipe 27 bythe carrier gas to be reacted in the supply pipe 27. A film was formedon the substrate 20 by the CVD reaction on the film formation surface ofthe substrate 20.

5. Evaluation

A phase of the film thus obtained was identified. The identification wascarried out by 2θ0/ω scanning at an angle from 15 to 95 degrees using anXRD diffractometer. The measurement was performed using CuK α rays. As aresult, the crystalline semiconductor film thus obtained had a filmthickness of 3.5 μm.

For evaluation of the electrical characteristics of the film thusobtained, the Hall effect was measured by the van der pauw method. Themeasurement environment was at room temperature and a frequency of theapplied magnetic field at 50 mHz. As a result, the carrier concentrationwas 4.33×10¹⁸ (1/cm²) and the mobility was 19 (cm²/V·s).

Example 2

Respective raw-material solutions of gallium bromide and germanium oxidewere prepared at an atomic ratio of germanium to gallium of 1E-7, 1E-6,8E-5, 4E-4, 2E-3, 1E-2, 2E-1, and 8E-1. At this point, a 48% hydrobromicacid solution was contained at a volume ratio of 10%. Films were formedin the film formation conditions same as those in Example 1 forquantitative analysis of the concentration of impurities using SIMS, thetype of incident ion of oxygen, and output of 3 kV and 200 nA. Theresults are illustrated in FIG. 21 . As illustrated in FIG. 21 , it wasfound that a dopant content ratio in the liquid and a doping amount inthe crystal film have a correlation and adjustment of the dopant contentratio in the liquid facilitates control of the doping concentration inthe film to be formed.

Example 3

In the same manner as in Condition 1 other than changing theconcentration of germanium oxide to 1.0×10 ⁻³ mol/L instead of 5.0×10⁻³mol/L, a germanium doped α-Ga₂O₃ film was formed on the c-plane sapphiresubstrate as the n+semiconductor layer. On the film thus formed, anundoped α-Ga₂O₃ film was then formed as the n-semiconductor layer. Then−semiconductor layer was formed in the same manner as above other thandoping was not performed. The crystalline semiconductor film thusobtained had a film thickness of 7.6 μm and the film formation time was180 minutes. Then, as illustrated in FIG. 22 , part of then−semiconductor layer 101 a was etched, followed by providing the ohmicelectrode 105 b of Ti on the n+semiconductor layer 101 b and theSchottky electrode 105 a on the n−semiconductor layer 101 a bysputtering to fabricate an SBD.

The SBD thus obtained was subjected to SIMS analysis (Cs, 3 kV, 200 nA,Ap 16%, Raster 400). The results are illustrated in FIG. 23 . As clearlyseen from FIG. 23 , germanium was not contained up to around 1500seconds past in the sputtering time on the abscissa, and from 1500seconds to 4000 seconds approximately, germanium was uniformly containedand the n+type semiconductor layer and the n−type semiconductor layerwere formed well.

Example 4

An aqueous solution of gallium bromide and tetraethyl orthosilicate wasprepared at a ratio of an amount of substance of 100:1. At this point, a48% hydrobromic acid solution was contained at a volume ratio of 10%.The concentration of silicon bromide was 1.0×10 ⁻³ mol/L. In theconditions where a film formation temperature was 500° C., the carriergas was nitrogen, and a flow rate was 5 L/min, a film was formed. Thefilm was formed in the same manner as in Example 1 in the other filmformation conditions. The film thus obtained was subjected to phaseidentification by 2θ/ω scanning at an angle from 15 to 95 degrees usingan XRD diffractometer. The measurement was performed using CuK α rays.As a result, the film thus obtained was α-Ga₂O₃. The film had athickness of 2.5 μm.

The film thus obtained was subjected to SIMS analysis (Cs, 3 kV, 200 nA,Ap 16%, Raster 4000. The results are illustrated in FIG. 24 . It isfound that silicon was doped well. germanium was not contained up toaround 1500 seconds past in the sputtering time on the abscissa, andfrom 1500 seconds to 4000 seconds approximately, germanium was uniformlycontained and the n+type semiconductor layer and the n−typesemiconductor layer were formed well. The electrical characteristics orthe like exhibited performance equivalent to that in Example 1 wheregermanium is contained.

Example 5

A crystalline semiconductor film was formed in the same manner as inExample 3. After film formation, the crystalline semiconductor film waspeeled off from the substrate due to ultrasonic vibration. The film thusobtained was subjected to phase identification by 2θ/ω scanning at anangle from 15 to 95 degrees using an XRD diffractometer. The measurementwas performed using CuK α rays. As a result, the film thus obtained wasα-Ga₂O₃. The film had a thickness of 7.6 μm, and the film formation timewas 180 minutes.

The free-standing film thus obtained was subjected to structureevaluation using an X-ray diffractometer. As a result of X-raydiffraction, FIG. 25 illustrates an X-ray diffraction image. As clearlyseen from FIG. 25 , there is no diffraction spot for the substrate andthus the film is understood as a free-standing film.

Example 6

As illustrated in FIG. 26 , from a free-standing film 171 obtained inExample 5, an SBD was fabricated using tungsten as a Schottky electrode175 a and indium as an ohmic electrode 175 b. The SBD thus obtained wassubjected to current-voltage characteristics evaluation. The results areillustrated in FIG. 27 .

Example 7

In the same manner as in Example 1, a crystalline semiconductor film wasformed for a long formation time. The film thus obtained was subjectedto phase identification by 2θ/ω scanning at an angle from 15 to 95degrees using an XRD diffractometer. The measurement was performed usingCuK α rays. As a result, the film thus obtained was α-Ga₂O₃. The filmhad a thickness of 50 μm, and the film thickness of 50 μm resulted in nolonger a film but sheet-like.

Example 8

In the same manner as in Example 1, a crystalline semiconductor film wasformed. The film thus obtained was subjected to phase identification by2.theta./.omega. scanning at an angle from 15 to 95 degrees using an XRDdiffractometer. The measurement was performed using CuK α rays. As aresult, the film thus obtained was α-Ga₂O₃. The film had a thickness of1.9 μm. Directly using the film thus obtained, as illustrated in FIG. 28, a MESFET was fabricated. The MESFET in FIG. 28 was provided with agate electrode 185 a, a source electrode 185 b, a drain electrode 185 c,an n type semiconductor layer 181, and a substrate 189. The n typesemiconductor layer 181 was α-Ga₂O₃, where the gate electrode 185 a wasmade from platinum (Pt) and the source electrode 185 b and the drainelectrode 185 c were formed from titanium (Ti)-gold (Au) alloy. FIG. 29illustrates the DC characteristics of the MESFET thus fabricated. Asclearly seen from FIG. 29 , almost no leakage current was found, andparticularly, a result of approximately 0.5 nA at a gate voltage of −25V was obtained. The current reached 519 μA at a gate voltage of 1 V, sothat the on-off ratio was a relatively high value of 10⁶.

Example 9

9-1. Film Formation Apparatus

With reference to FIG. 30 , a mist CVD apparatus 1 used in the presentExample is described. The mist CVD apparatus 1 was provided with acarrier gas source 2 a to supply a carrier gas, a flow regulating valve3 a to regulate a flow rate of the carrier gas discharged from thecarrier gas source 2 a, a dilution carrier gas source 2 b to supply adilution carrier gas, a flow regulating valve 3 b to regulate a flowrate of the dilution carrier gas discharged from the dilution carriergas source 2 b, a mist generator 4 to store a raw-material solution 4 a,a container 5 to keep water 5 a, an ultrasonic vibration transducer 6mounted at a bottom of the container 5, a film formation chamber 7, asupply pipe 9 connecting the mist generator 4 to the film formationchamber 7, a hot plate 8 placed in the film formation chamber 7, and anexhaust outlet 11 to exhaust mist, droplets, and exhaust gas afterthermal reaction. On the hot plate 8, a substrate 10 was placed.

9-2. Preparation of Raw-Material Solution

Gallium bromide and germanium oxide were mixed to water to prepare anaqueous solution at an atomic ratio of germanium to gallium of 1:0.01.At this point, hydrobromic acid was contained at a volume ratio of 10%to make a raw-material solution.

9-3. Film Formation Preparation

The raw-material solution 4 a obtained in 2. above was stored in themist generator 4. Then, a 4-inch sapphire substrate was placed on thehot plate 8 as the substrate 10. The hot plate 8 was activated to raisea temperature in the film formation chamber 7 to 550° C. The flowregulating valves 3 a and 3 b were then opened to supply a carrier gasfrom carrier gas supply means 2 a and 2 b as the carrier gas sourcesinto the film formation chamber 7. After the carrier gas sufficientlysubstituted for the atmosphere in the film formation chamber 7, the flowrate of the carrier gas was regulated at 5.0 L/min. and the flow rate ofthe dilution carrier gas was regulated at 0.5 L/min As the carrier gas,oxygen was used.

9-4. Film Formation

The ultrasonic vibration transducer 6 was then vibrated at 2.4 MHz. Thevibration propagated through the water 5 a to the raw-material solution4 a, thereby atomizing the raw-material solution 4 a to produce mist 4b. The mist 4 b was introduced to the film formation chamber 7 throughthe supply pipe 9 by the carrier gas. The mist was thermally reacted inthe film formation chamber 7 at 550° C. under atmospheric pressure toform an n+layer on the substrate 10. As the second layer, an n⁻ layerwas formed using a raw-material solution same as that for the firstlayer other than not using germanium oxide and in the conditions same asthose in the first layer. The film formation time was 4 hours and 30minutes.

In addition, using the mist CVD apparatus in FIG. 18 , the second layerwas regrown in the conditions same as above. The film formation time was120 minutes. The crystalline semiconductor film had a film thickness of11.9 μm in total, where the n+layer had a film thickness of 3.8 μm andthe n⁻ layer had a film thickness of 8.1 μm. The phases of the filmsthus obtained were identified using an XRD diffractometer, and all thefilms thus obtained were α-Ga₂O₃.

9-5. Electrode Formation

After the sapphire substrate was peeled off from the α-Ga₂O₃ film, goldas a Schottky electrode and Ti/Au as an ohmic electrode were formed bythe vapor deposition, respectively on the n⁻ layer and the n⁺ layer tofabricate an SBD.

9-6. Evaluation

The SBD thus obtained was subjected to current-voltage characteristicsevaluation. FIG. 31 illustrates the results in a forward direction, andFIG. 32 illustrates the results in a reverse direction. As clearly seenfrom the results, the electrical characteristics of the semiconductorwere excellent, and particularly, the withstand voltage in the reversebias was more than 300 V. It is thus found that the product of thepresent invention has good diode characteristics.

Example 10

10-1. Film Formation Apparatus

In the same manner as in Example 9, the film formation apparatusillustrated in FIG. 30 was used.

10-2. Preparation of Raw-Material Solution (for Buffer Layer)

Hydrochloric acid was contained at a volume ratio of 1.5% in a 0.05 Maqueous iron-acetyl acetylacetonato solution to make a raw-materialsolution for a buffer layer.

10-3. Film Formation Preparation

The raw-material solution 4 a for a buffer layer obtained in 10-2. abovewas stored in the mist generator 4. A sapphire substrate was then placedon the hot plate 8 as the substrate 10. The hot plate 8 was activated toraise a temperature of the heater to 550° C. The flow regulating valves3 a and 3 b were then opened to supply a carrier gas from the carriergas supply means 2 a and 2 b as the carrier gas sources into the filmformation chamber 7. After the atmosphere in the film formation chamber7 was sufficiently purged with the carrier gas, the flow rate of thecarrier gas was regulated at 2.0 L/min. and the flow rate of thedilution carrier gas was regulated at 0.5 L/min As the carrier gas,nitrogen was used.

10-4. Formation of Buffer Layer

The ultrasonic vibration transducer 6 was then vibrated at 2.4 MHz. Thevibration propagated through the water 5 a to the raw-material solution4 a, thereby atomizing the raw-material solution 4 a to produce mist 4b. The mist 4 b was introduced to the film formation chamber 7 throughthe supply pipe 9 by the carrier gas. The mist 4 b was thermally reactedin the film formation chamber 7 at 550° C. under atmospheric pressure toform a buffer layer on the substrate 10. The film formation time was 30minutes.

10-5. Preparation of Raw-Material Solution

A 0.05 M aqueous gallium bromide solution was prepared. At this point,hydrobromic acid was contained at a volume ratio of 20% and tin bromidewas further added at 8 atom % of tin to gallium to make a raw-materialsolution.

10-6. Film Formation Preparation

The raw-material solution 4 a obtained in 10-5. above was stored in themist generator 4. A sapphire substrate with a buffer layer was thenplaced on the hot plate 8 as the substrate 10. The hot plate 8 wasactivated to raise a temperature of the heater to 500° C. The flowregulating valves 3 a and 3 b were then opened to supply a carrier gasfrom the carrier gas supply means 2 a and 2 b as the carrier gas sourcesinto the film formation chamber 7. After the atmosphere in the filmformation chamber 7 was sufficiently purged with the carrier gas, theflow rate of the carrier gas was regulated at 1.0 L/min and the flowrate of the dilution carrier gas was regulated at 0.5 L/min As thecarrier gas, a forming gas (H₂:N₂=5:95) was used.

10-7. Film Formation

The ultrasonic vibration transducer 6 was then vibrated at 2.4 MHz. Thevibration propagated through the water 5 a to the raw-material solution4 a, thereby atomizing the raw-material solution 4 a to produce mist 4b. The mist 4 b was introduced to the film formation chamber 7 throughthe supply pipe 9 by the carrier gas. The mist 4 b was thermally reactedin the film formation chamber 7 at 550° C. under atmospheric pressure toform a buffer layer on the substrate 10. The film formation time was 300minutes.

10-8. Peeled Film

The buffer layer was dissolved by concentrated hydrochloric acid to peeloff the film obtained in 10-4. above from the substrate. The film thusobtained had a film thickness of 4 μm. The film was identified using anX-ray diffractometer as α-Ga₂O₃. FIG. 33 illustrates the results of XRD.As clearly seen from FIG. 33 , there are no peak of the sapphiresubstrate and no peak of the buffer layer to find that the film was aclean peeled film of α-Ga₂O₃. The α-Ga₂O₃ film thus obtained was cut outto 1 mm square using a laser. FIG. 34 illustrates a photograph of theα-Ga₄₂O₃ film before cut out, and FIG. 35 illustrates the α-Ga₂O₃ filmafter cut out. As clearly seen from FIG. 34 , the peeled film thusobtained had a film surface area of 5 mm square or more. As clearly seenfrom FIG. 35 , the α-Ga₂O₃ film of good quality in 1 mm square was cutout.

INDUSTRIAL APPLICABILITY

The crystalline semiconductor film and the sheet like object of thepresent invention can be used in any field, such as semiconductors(e.g., compound semiconductor electronic devices, etc.), electroniccomponents and electric device components, optical and electronicphotography related devices, and industrial components. They areexcellent in semiconductor properties and particularly useful forsemiconductor devices.

REFERENCE SIGNS LIST

1 Mist CVD Apparatus

2 a Carrier Gas Source

2 b Dilution Carrier Gas Source

3 a Flow Regulating Valve

3 b Flow Regulating Valve

4 Mist Generator

4 a Raw-Material Solution

4 b Mist

5 Container

5 a Water

6 Ultrasonic Vibration Transducer

7 Film Formation Chamber

8 Hot Plate

9 Supply Pipe

10 Substrate

11 Exhaust Outlet

19 Mist CVD Apparatus

20 Substrate

21 Susceptor

22 Carrier Gas Supply Means

23 Flow Regulating Valve

24 Mist Generator

24 a Raw-Material Solution

25 Container

25 a Water

26 Ultrasonic Vibration Transducer

27 Film Formation Chamber

28 Heater

51 Susceptor

52 Mist Acceleration Means

53 Substrate Holder

54 Support Unit

55 Supply Pipe

61 Substrate-Susceptor Region

62 Exhaust Region

101 a n−Type Semiconductor Layer

101 b n+Type Semiconductor Layer

102 p Type Semiconductor Layer

103 Semi-Insulating Layer

104 Insulating Layer

105 a Schottky Electrode

105 b Ohmic Electrode

109 Substrate

111 a n−Type Semiconductor Layer

111 b n+Type Semiconductor Layer

114 Semi-Insulating Layer

115 a Gate Electrode

115 b Source Electrode

115 c Drain Electrode

118 Buffer Layer

121 a n Type Semiconductor Layer with Wide Band Gap

121 b n Type Semiconductor Layer with Narrow Band Gap

121 c n+Type Semiconductor Layer

123 p Type Semiconductor Layer

124 Semi-Insulating Layer

125 a Gate Electrode

125 b Source Electrode

125 c Drain Electrode

128 Buffer Layer

129 Substrate

131 a n−Type Semiconductor Layer

131 b First n+Type Semiconductor Layer

131 c Second n+Type Semiconductor Layer

132 p Type Semiconductor Layer

134 Gate Insulating Film

135 a Gate Electrode

135 b Source Electrode

135 c Drain Electrode

138 Buffer Layer

139 Semi-Insulating Layer

141 a n−Type Semiconductor Layer

141 b First n+Type Semiconductor Layer

141 c Second n+Type Semiconductor Layer

142 p Type Semiconductor Layer

145 a Gate Electrode

145 b Source Electrode

145 c Drain Electrode

151 n Type Semiconductor Layer

151 a n−Type Semiconductor Layer

151 b n+Type Semiconductor Layer

152 p Type Semiconductor Layer

154 Gate Insulating Film

155 a Gate Electrode

155 b Emitter Electrode

155 c Collector Electrode

161 n Type Semiconductor Layer

162 p Type Semiconductor Layer

163 Light Emitting Layer

165 a First Electrode

165 b Second Electrode

167 Translucent Electrode

169 Substrate

171 α-Ga₂O₃ layer

175 a Tungsten Electrode

175 b Indium Electrode

181 n Type Semiconductor Layer

185 a Gate Electrode

185 b Source Electrode

185 c Drain Electrode

189 Substrate

The embodiments of the invention in which an exclusive property orprivilege is claimed are defined as follows:
 1. A semiconductor devicecomprising: a crystalline semiconductor film that comprises a corundumstructured oxide semiconductor as a major component, the oxidesemiconductor that comprises an oxide comprising gallium and/or indium,and a thickness of the crystalline semiconductor film that is 1 μm ormore; and an electrode that is arranged on the crystalline semiconductorfilm, the crystalline semiconductor film having a trench structureincluding at least one or more trench grooves.
 2. The semiconductordevice of claim 1, wherein the trench structure includes two or moretrench grooves.
 3. The semiconductor device of claim 1, wherein at leasta part of the electrode is arranged in the trench grooves.
 4. Thesemiconductor device of claim 3, wherein at least the part of theelectrode is arranged in the trench grooves via an insulating film. 5.The semiconductor device of claim 1, wherein the oxide semiconductorincludes at least gallium.
 6. The semiconductor device of claim 1,wherein the crystalline semiconductor film includes gallium at an atomicratio of 0.5 or more in the metal elements contained in the crystallinesemiconductor film.
 7. The semiconductor device of claim 1, wherein thecrystalline semiconductor film includes an n− type semiconductor layerand an n+type semiconductor layer.
 8. The semiconductor device of claim1, wherein the semiconductor device is a vertical device.
 9. Thesemiconductor device of claim 1, wherein the semiconductor device is apower device.
 10. The semiconductor device of claim 1, wherein thesemiconductor device is a Schottky barrier diode (SBD), a Metal oxidesemiconductor field effect transistor (MOSFET), a static inductiontransistor (SIT), a Junction field effect transistor (JFET), or aninsulated gate bipolar transistor (IGBT).
 11. A semiconductor devicecomprising: a crystalline semiconductor film that comprises an oxidesemiconductor that comprises an oxide comprising gallium and/or indium,and a thickness of the crystalline semiconductor film that is 1 μm ormore; and a Schottky electrode that is arranged on the crystallinesemiconductor film, the crystalline semiconductor film having a trenchstructure including at least two or more trench grooves, at least a partof the Schottky electrode that is arranged in the trench grooves via aninsulating film, and the semiconductor device is a diode.